Vacuum type parallel sealing welding application and sealing welding equipment

Release time:

2024-05-11 08:43

Source:

Vacuum type parallel sealing welding refers to the precise alignment of the upper cover plate of the semiconductor device on the tube shell through the machine vision system in a vacuum environment, and then the tube shell shell and the cover plate of the device are "sealed and welded" under a certain pressure by parallel sealing welding method ".

The advantages of this sealing welding are: first, slow heat conduction in vacuum environment, which is conducive to the protection of chips and circuits inside the device; second, under vacuum condition, the gas damping in the vacuum chamber is small, which will produce a large high Q value, thus improving the performance of many M E M S products and many products with moving mechanism components.

Beijing Aote Hengye Electrical Equipment Co., Ltd. currently has 3 parallel sealing welding machines and manual, semi-automatic and fully automatic parallel sealing welding machines for vacuum parallel sealing welding devices. It can ensure that the water and oxygen content in the airtight environment for device sealing is below 10 p p m, the device with rectangular device size of 2 to 180mm and circular diameter of less than 150mm can be sealed, the cover plate design is automatically carried, the spot welding or seam welding capacity is 180 to 300 pieces per hour, and the fitting and alignment accuracy of the tube shell and the cover plate is less than or equal to plus or minus 35 microns. The equipment has high precision and stable operation.

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